"ELMOS"
Product analysis data
Phosphorus trichloride
Element
Concentration, ppm
Concentration, %% weight
Al
<0.2
<2 · 10
−5
Fe
<0.2
<2 · 10
−5
Cu
<0.1
<1 · 10
−5
Ni
<0.1
<1 · 10
−5
Pb
<0.05
<5 · 10
−6
Ag
<0.005
<5 · 10
−7
Bi
<0.05
<5 · 10
−6
B
<0.1
<1 · 10
−5
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